MICROINTERFEROEMTRIC TOMOGRAPHY FOR RECONSTRUCTION OF 3D REFRACTIVE INDEX DISTRIBUTION IN PLANE MICROELEMENTS

摘要

The paper gives a review of interferometric tomography with focus on their necessary modification when applied to 3D refractive index determination in micro-objects. Specificly the influence of diffraction phenomenon and radial run-out occurring during measurement are analysed. The analysis is confirmed by results of measurements of 3D refractive index distribution in a multimode and single mode fibres. Additionally the discussion of future work at photoelastic tomography applied for microobjects is given.