Experimental Research on Microelectroforming with Ultrasonic Agitation

摘要

High frequency acoustic agitation is known to improve mass transport in conventional electroplating and electroforming. To better understand the effect of ultrasonic agitation on microelectroforms with high height-to-width aspect recessed microstructure features, electroforming of Ni from a nickel sulfamate type electrolyte under the influence of high frequency ultrasound (33KHz) at different level of power intensity from 2W/cm2 to 16W/cm2 was investigated experimentally in this paper, and then optimum operating parameters were determined basing on surface topography. A number of microelectroforming experiments assisted with acoustic agitation were further carried out to demonstrate and revise the optimum process parameters and further some metal microdevices were produced. Experimental results showed that fewer drawbacks in the microelectroforms, such as nubbles, pits, blunt-edges, and collapses were observed in the microcomponents when sonication power 12W/cm~2～14W/cm~2 was drawn on. Microelectroforming with ultrasonic irradiation at appropriate power intensity was characterized by better surface morphology and better uniform filling behavior.