High-Frequency Micro Supercapacitors Based on High-Aspect-Ratio 3D Nanoporous Gold Interdigital Electrodes for On-Chip Filtering

摘要

Micro supercapacitor (MSC) featured by high capacity and superior frequency response, is a great candidate to replace bulky electrolytic capacitors in circuits for miniaturization. This paper presents a novel high-aspect-ratio three-dimensional(3D) nanoporous gold (NPG) interdigital electrode with thickness as high as 8 μm. The thick electrodes render the micro device an unprecedented high capacitance of 1.64 mF/cm