Automated High-Throughput Hermetic Failure Monitoring System for Millimeter-Sized Wireless Implantable Medical Devices

摘要

This paper presents an automated high-throughput hermetic failure monitoring system for millimeter-sized wireless implantable biomedical devices (IMDs). To protect the electronics from the harsh body environment as well as the body from potential toxic chemicals in the package of the IMDs, a lifetime estimation for the hermetic package of the IMDs is essential as a key part of IMD design and development. However, traditional leak tests are not suitable for the small form factor of mm-sized IMDs. The presented automated hermetic failure monitoring system can enable lifetime estimations for multiple mm-sized wireless IMDs at low cost and in a user-friendly setup. Thereby, liquid/vapor ingression into the IMD package is monitored by registering the phase-dip frequency shift of a passive LC tank. Exposing 1.3×1.3 mm