Nonlinearity of Degenerately Doped Flexural Mode Silicon Micromechanical Resonators

摘要

) degenerately doped double-ended tuning forks. We employ closed-loop frequency sweeps to characterize the amplitude-frequency response of each system. Experimental results show that geometric nonlinearities and electrostatic nonlinearities dominate material and crystalline orientation-dependent nonlinearities in the flexural mode. These results present an initial exploration into characterizing nonlinear mechanical behavior of resonators operating in lower frequency bending modes.