Signal Enhancement in MEM Resonant Sensors Using Parametric Suppression

摘要

We use parametric suppression for signal amplifi-cation in a phase-modulated microelectromechanical (MEM) charge detector. Simultaneously driving and parametrically pumping a MEM resonator with the appropriate relative phase increases the phase slope near the resonant frequency. We use this to increase the sensitivity of a MEM electrometer more than tenfold.