Monolithic Integrated CMOS-MEMS MOS type Gas Sensor and Novel Heater for Sensitivity and Power Consumption Enhancement

摘要

This study designs and implements a metal-oxide semiconductors (MOS) type gas sensor in Fig. 1. The chip is implemented using TSMC 0.35μm 2P4M standard CMOS process and the sensing material is prepared by hydrothermal synthesis method. The gas concentration is detected based on the resistance change measured by the proposed sensor. Features of this study are (Fig. 1): (1) reduction of size through vertical integration of heater and ZnO-SnO