A Mems Pressure Sensor Based on Double- Ended Tuning Fork Resonator with on-Chip Thermal Compensation

摘要

This paper reports a MEMS pressure sensor based on quartz crystal double-ended tuning fork (DETF) resonator with on-chip thermal compensation. Although the DETF resonator shows excellent performances, its bias drift over temperature is a main performance limitation. We design a new structure comprising a single-ended tuning fork (SETF) resonator to overcome the limitation. The SETF resonator shows good sensitivity over temperature and senses the instantaneous temperature of the DETF resonator, ensuring a better compensation of thermal drifts for pressure measurement. Experimental results show that the SETF resonator used as a temperature sensor for thermal compensation will effectively remove the effects of temperature drift on the DETF at applied pressure 1000kPa over the temperature range -20°C to +25°C with the rate of 4.5°C/min.