Unique Method of Si Lenses Fabrication for Wafer Level Packaging

摘要

This paper presents a novel technology platform to fabricate miniaturized Silicon optics on wafer level by embedding refractive spherical lenses in wafer level packages. Using the exact curvature of spherical preforms that are subsequently grinded to form a plano-convex lens, the approach promises excellent optical properties for IR spot detectors and could eliminate the need for expensive 100 % optical measurements in manufacturing. It provides new degrees of freedom to product designers at lower cost on the system level.