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Improved Reference-Free Vibration-Suppressed Optical MEMS Electric Field Strength Sensor

机译:改进的无参考振动抑制光学MEMS电场强度传感器

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Reliable measurement of the low-frequency and static electric field strength are essential in a number of areas such as atmospheric electricity, high-voltage infrastructure and safety. Such measurements are hard to achieve, since inherent distortions or limited bandwidth render them impossible. This paper shows a distortion-free electric field strength sensor based on a completely passive micromechanical structure with significantly improved suspension for vibration suppression. With this suspension, the responsivity to electric fields was increased while the responsivity to vibrations was decreased by separating the according modes. This trend can be continued to achieve even more robust and more sensitive sensors. The exemplary structure presented in this contribution features a resolution limit of 370 V/m/Hz
机译:在许多领域,例如大气电力,高压基础设施和安全性,可靠地测量低频和静电场强度至关重要。由于固有的失真或有限的带宽使其无法实现,因此此类测量很难实现。本文展示了一种基于完全无源微机械结构的无畸变电场强度传感器,具有显着改善的悬架以抑制振动。通过这种悬挂,通过分离相应的模式,提高了对电场的响应性,同时降低了对振动的响应性。可以继续保持这种趋势,以实现更坚固,更灵敏的传感器。此贡献中提供的示例性结构具有370 V / m / Hz的分辨率极限

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