Self-Heated Thermoresistive Flow Sensor Coated with Parylene-C for Reliability Enhancement by Using 0.35µM CMOS MEMS Technology

摘要

/P) of 171 mV/(m/s)/W, while keeps a low power consumption P < 18.3 mW for the input gas flow from 0 to 10 m/s. Moreover, the achieved accuracy of ±0.04 m/s within the linear range of 0~2.5 m/s, enabling this robust flow sensor (more than 9 years of working time) for the indoor airflow measurement even in the moist condition. Therefore, this highly sensitive and long term reliable SHTF sensor with the coated Parylene-C layer will be a very promising flow sensing node for the smart Energy-efficient Buildings (EeBs).