首页> 外文会议>International Conference on Solid-State Sensors, Actuators and Microsystems & Eurosensors XXXIII >Piezoresistive Microcantilevers 3D-Patterned Using Zno-Nanorods@Silicon-Nanopillars for Room-Temperature Ethanol Detection
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Piezoresistive Microcantilevers 3D-Patterned Using Zno-Nanorods@Silicon-Nanopillars for Room-Temperature Ethanol Detection

机译:Zno-Nanorods @ Silicon-Nanopillars对3D模式的压阻微悬臂梁进行室温乙醇检测

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This paper reports a self-actuating and self-sensing gravimetric ethanol sensor, based on 3D ZnO-Nanorods@Si-Nanopillars (ZnO-NRs@Si-NPLs) as the sensing material which, for the first time, are selectively fabricated on a piezoresistive silicon microcantilever (MC, Fig. 1). This novel ZnO-NRs@Si-NPLs functionalized microcantilever (MC) was found to be highly sensitive to ethanol detection at room-temperature, with a sensitivity of hundred times higher than that of a ZnO-nanofilm-covered MC. Furthermore, fast response and recovery time of few seconds to low-concentration ethanol can be expected. In addition, real-time sensing is possible using a low-cost, low-weight, miniaturized phase-locked-loop (PLL) based system, indicating the potential of our proposed sensor for future portable gas-sensing in practical applications.
机译:本文报告了一种基于3D ZnO-Nanorods @ Si-Nanopillars(ZnO-NRs @ Si-NPLs)作为感测材料的自驱动和自感应重量乙醇传感器,该传感器首次有选择地在传感器上制造。压阻硅微悬臂梁(MC,图1)。发现这种新颖的ZnO-NRs @ Si-NPLs功能化微悬臂梁(MC)对乙醇在室温下的检测高度敏感,其灵敏度比ZnO-纳米膜覆盖的MC高100倍。此外,可以预期对低浓度乙醇的快速响应和数秒的恢复时间。此外,使用基于低成本,重量轻,小型化的锁相环(PLL)的系统可以进行实时感测,这表明我们提出的传感器在实际应用中对未来便携式气体感测的潜力。

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