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AlN PMUT-based Ultrasonic Power Transfer Links for Implantable Electronics

机译:基于AlN PMUT的用于植入式电子设备的超声波功率传输链路

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The present work reports on the first demonstration of acoustic power transfer through the use of Aluminum Nitride (AlN) Piezoelectric Micro Machined Ultrasonic Transducer (PMUT) arrays at transmission distances suitable for intra-body powering applications. In contrast to Lead Zirconate Titanate (PZT), used as the piezoelectric in state-of-the-art devices, AlN offers higher biocompatibility and the possibility of single chip integration with Complementary Metal Oxide Semiconductor (CMOS) technology. An output power of 1 μW, from a minute (8 mm x 8 mm x 300 μm) PMUT array chip, was achieved on an optimal 330 Ω load. The operating frequency was 2 MHz, through a distance of 4 cm, in an oil medium resembling intra-body conditions. This implementation is a critical step towards increasingly miniaturized, highly integrated implantable circuits.
机译:本工作报告了通过使用氮化铝(AlN)压电微机械超声换能器(PMUT)阵列以适合人体供电应用的传输距离进行声功率传输的首次演示。与在先进设备中用作压电体的锆酸钛酸铅(PZT)相比,AlN具有更高的生物相容性,并具有与互补金属氧化物半导体(CMOS)技术进行单芯片集成的可能性。在最佳330负载下,从一分钟(8 mm x 8 mm x 300μm)PMUT阵列芯片获得的输出功率为1μW。在类似于体内条件的油介质中,工作频率为2 MHz,经过4 cm的距离。该实现是朝日益小型化,高度集成的可植入电路迈出的关键一步。

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