A Bistalbe Ultrasonic MEMS Device with an Integrated Piezoelectric Scandium-AlN Thin Film Actuator for Switching

摘要

) thin film actuators. The minimum voltage needed to switch between the stable states was about 23% lower than using a pure AlN layer. Depending on the membrane diameter being in the range between 600 to 800 µm, the total displacement after switching is about 10 to 16 µm. The array consists of 15 membranes on a 6x6 mm