AGC-Less Operation of High-Stability Lissajous Frequency-Modulated Mems Gyroscopes

摘要

The paper presents the first frequency-modulated gyroscope (FMG) operated under Lissajous excitation without motion control along the two axes. This operation method is compared to operation under velocity control and under displacement control to show that no significant differences in performance are achieved for the tested axisymmetric structure. At the same time, this operation method can boost the performance in terms of low-power consumption and low-noise by exploiting single-transistor-based oscillators in the system. A 1.6 Hz/Hz ratiometric scale-factor, a sub-0.3% linearity error, a scale-factor stability within 100 ppm/K and a noise of 6.3 mdps/√Hz (the smallest ever reported on FMGs operated in Lissajous mode) are demonstrated.