A Novel Micro Shell Resonator Gyroscope with Sixteen T-Shape Masses

摘要

A novel micro shell resonator gyroscope (MSRG) with sixteen T-shape masses is proposed in this paper. Micro blow torching with whirling platform has been presented to fabricate the fused silica shell structure with high structure symmetry. The sixteen T-shape masses are released with femtosecond laser ablation for high processing efficiency and quality. The performances of MSRG are evaluated by using out-of-plane capacitive transduction. The MSRG is operated in force-rebalance mode, which demonstrates a scale factor (SF) of 0.112V/(deg/s), an angle random walk (ARW) of 0.035deg/√h and a bias stability of 0.877deg/h, showing great potential for high-performance gyroscope.