Application to the atmospheric pressure discharge electrode of a carbon nanotube electrode

摘要

Formation by the hot filament CVD method which can deposit a carbon nano tube (CNT) on an electrode relatively easily was tried using the alcohol as a source of carbon. Good deposition of CNT was completed in the case with little input power of the filament. Atmospheric pressure RF plasma was generated using the electrode covered by CNT. Relatively high-temperature and high-density plasma was stably generable with the effect of CNT.