Electron transport parameters and rate coefficients for the modeling a RF discharge in N N2-CH -CH4

摘要

This work reports our calculations towards the modelling of a capacitively coupled RF dischargein a N2-CH4 mixture, using the local mean energy approximation, in which the space-time profileof the reactor is related to the electronic rate coefficients and electron transport parameters throughthe values of the electron mean energy. The electron diffusion and mobility coefficients forparticle and energy transport are presented as a function of the electron mean energy in the range1- 15 eV, by solving the Boltzmann equation for two mixture compositions: N2-2%CH4 and N2-10%CH4. The electron ionisation coefficients related to the production of N2+, CH4+ and CH3+ are also calculated.