Effect of gas heating on excimer distribution in DBD Xe excimer lamp

摘要

Effect of gas heating on Xe2* excimer density distribution was investigated using a two dimensionalfluid model. In the present model, to taking account of gas heating due to ions and electrons, gastemperature equation and ion energy equations are considered. In Xe DBD, Xe3+ ions are mostimportant species for gas heating. And ions were accelerated only in sheath regions. As a result, gastemperature increased in front of the dielectrics. However, these high gas temperature regions affectto Xe2* excimer density distribution significantly. The Xe2* excimer filaments were formed inbended shape due to high gas temperature spots and another high excimer density regions were formed between the filaments.