Generation and characteristics of rf discharge plasmas in contact with ionic liquids under low gas pressure

摘要

Radio frequency (rf) discharge plasmas with an ionic liquid (1-buthl-3-methylimidazoliumtetrafluoroborate) which has extremely low vapor pressure are generated under low gas pressuresfor clarifying the ion behavior in the gas-liquid interfacial region, such as a plasma ion irradiationtoward the ionic liquid. The formation of sheath electric fields on the ionic liquid surface is observed,and the ion irradiation to the ionic liquid with its energy controlled is realized. As a result, the ionirradiation causes the remarkable change of the ionic liquid color and has effects on the plasmaparameters in gas phase such as an increase in the electron density. The chemical and physicalreactions in the gas-liquid phases interfacial region induced by irradiating the plasma ion areexpected to contribute to the nano-compostie material synthesis.