Nano-thin CuO films doped with Au and Pd for gas sensors applications

摘要

The cupric oxide (CuO) thin films are promising materials in gas sensor applications. The CuO exhibits the highest sensitivity for hydrogen sulfide, but it may be also used as a sensor for carbon monoxide or nitrogen dioxide. The sensitivity and long-term stability are critical issues in gas sensor applications. The authors present the results of investigation on nano-thin film of CuO and CuO doped with Au and Pd. The films were deposited in magnetron sputtering technology on LTCC substrates. The results of gas sensor response are presented and discussed. The long-term stability test were performed.