Analysis of Laser-induced Damage in Optical Thin Film Based on ANSYS

摘要

The electric and thermal effects of optical thin film irradiated by Gaussian-pulsed laser are simulated with finite element method (FEM) based on the software ANSYS. The electric field intensity distribution of HfO_2/SiO_2 high reflective (HR) film is investigated. The transient heat-conduction model of the film is established for the calculation of temperature field of optical thin film coating. Simulation results show that, multilayer films are more prone to damage than single film, and the upper layer of HfO_2 layer in the spot center may easily be damaged.