Exponential Interpolation Technique for Scanning Electron Microscope Signal-to-Noise Ratio Estimation.

摘要

This paper introduces a new technique to estimate the SNR value of the focused SEM images from a defocus images. Basically SEM user took hours to make adjustment on the SEM and produced a focused image. Therefore, in order to solve the time consuming problem, a solution is proposed. Based on the experiments on 100 images, a method used an exponential equation is developed to estimate the noise-free zero offset point of a focused image by using a defocused image. This method uses less than a minute to process and it can overcome the time consuming problem while taking image repeatedly to get the most focus one.