Fabrication and Characterization of Carbon Nanotube Microdevices for CO

摘要

/Si and glass substrate. The metal film of 200 nm thickness is deposited on the substrate with an electron beam evaporation system. The minimum space between the electrodes is found to be 3 μm. The circular interdigitated metal electrodes have a larger area in comparison to the other types of interdigitated electrodes structures. Further, we fabricate Au NPs decorated SWNT-based devices with interdigitated electrodes. The fabricated devices show a good response to CO