PtSi Schottky-barrier infared focal plane arrays

摘要

Abstract: PtSi Schottky-barrier (SB) FPAs have been developed for ground-based thermal imaging and spaceborne remote sensing applications, making the best possible use of its process compatibility with Si LSIs. The FPAs for mid wavelength IR thermal imaging are large format 2D arrays with several array sizes up to 1040 $MUL 1040. An original readout architecture called the Charge Sweep Device has contributed to enhancing their sensitivities, and our state-of-the-art technology has reached a level which realizes FPAs with NETDs of the order of 30 mK. Extending the SB FPA technology to the short wavelength IR spectral region has made it possible to exploit spaceborne remote sensing applications. The space-grade performance and reliability have been demonstrated with a 4096 element and 2100 element linear FPAs. !15