Nitridation of steel 460LI-21Cr by plasma immersion ion implantation in capacitively couple radio frequency plasma

摘要

Results on nitriding of newly developed superferritic steel 460LI-21Cr in a low power 13.56 MHz capacitively coupled radio frequency plasma are reported. Nitrogen ions are implanted by plasma immersion ion implantation method for different process temperature, process time and gas mixture. Preliminary results of energy dispersive X-ray spectroscopy show presence of up to 15 % of nitrogen. The measured Vickers Hardness is found to increase up to 5 times. Detailed characterizations, including plasma parameters, will be presented.