INVESTIGATIONS OF MATERIALS AND MODELLING OF SENSITIVITY OF THICK-FILM RESISTORS ON DIFFERENT SUBSTRATES FOR STRAIN-GAUGE APPLICATIONS

摘要

This paper presents the results of an investigation into the characteristics of thick-film strain-gauges on alumina, zirconia,and LTCC substrates. These characteristics, which are used in analytical calculation and numerical modelling of the thickfilmresistors used in strain-gauge applications, are evaluated. The materials' compatibility and the significantcharacteristics (sheet resistivity, TCR, noise and GF) of selected 10 kΩ/sq. thick-film resistor materials were investigated.The resistors were printed and fired on different substrates: alumina, LTCC, and tetragonal zirconia substrates. Theexperimental results showed that the substrate has an important influence on the characteristics of the thick-film straingauges, not only because of chemical and microstructural interactions in the materials, but also because of the thermomechanicaland mechanical properties of both substrate and resistor. On the other hand, the construction of thick-film straingauges defines the sensitivity of the application. Finite-element analysis (FEA) was used as a method to improve theconstruction. To apply the appropriate characteristics in upcoming designs of different applications (load sensor, pressuresensor, etc) of thick-film strain gauges a simulation FEM (finite-element method) model was developed.