Automatic transfer of parametric FEM models into CAD-layout formats for top-down design of microsystems

摘要

A tool for the transfer of solid models used for FEM simulations into different layout formats used by CAD environments is presented. All necessary layers for the fabrication of microcomponents and systems in a given extended commercial CMOS process are generated automatically by this tool. Starting with an acceleration sensor the use of this translator for an application in the top-down design of microsystems with parametric components is described.