Light induced chemical vapor deposits of titanium dioxide are achieved on PMMA substrates from titanium tetra-isopropoxide with a long pulse (250 ns) 308 nm XeCl Excimer laser. Similarly to other results on non-polymeric substrates, localized deposits are achieved using a mask projection set up and the deposited thickness is precisely controlled. This paper focuses on the limitations of the process on polymeric substrates due to laser induced thermal effects. Based on both experimental results and theoretical laser induced temperature rise simulations, the laser induced temperature rise is shown to be responsible for: (ⅰ) the limitation of the used laser fluence to values below 20 mJ/cm~2/pulse not to damage the substrate. (ⅱ) the manifestation of cracks in the deposited films above a certain deposited film thickness. (ⅲ) the low crystalline state and the 9% carbon contamination of the deposited material.
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