首页> 外文会议>Electrical, optical, and magnetic properties of organic solid-state materials IV >STRUCTURAL APPROACH TO IMPROVE THE RESPONSE CHARACTERISTICS OF COPPER PHTHALOCYANTNE THIN FILM-BASED NO_2 GAS SENSOR
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STRUCTURAL APPROACH TO IMPROVE THE RESPONSE CHARACTERISTICS OF COPPER PHTHALOCYANTNE THIN FILM-BASED NO_2 GAS SENSOR

机译:改善铜酞菁薄膜基于薄膜的NO_2气体传感器响应特性的结构方法

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In order to realize a high-sensitivity, low temperature operable NO_2 gas sensor, thin films of α-form copper phthalocyanine (α-CuPc) have been deposited by vacuum sublimation. In this study, we have attempted to improve the gas-sensing characteristics through a modification of the film microstructure. Firstly, the gas sensitivity is remarkably increased by an insertion of higher-sensitive layer (vanadyl Pc film) between the α-CuPc film and the glass substrate in the low gas concentration range. Secondly, a reversibility in cycles of gas doping and dedoping is improved by film deposition on hydrofluoric acid-treated substrate. It is found from atomic force microscope analyses that this phenomenon may be closely related to a modification of the film microstructure.
机译:为了实现高灵敏度,低温可操作的NO_2气体传感器,已经通过真空升华沉积了α型铜酞菁(α-CuPc)薄膜。在这项研究中,我们试图通过改变膜的微观结构来改善气敏特性。首先,在低气体浓度范围内,通过在α-CuPc膜和玻璃基板之间插入高灵敏度层(钒基Pc膜),显着提高了气体敏感性。其次,通过在氢氟酸处理的衬底上进行膜沉积,改善了气体掺杂和去掺杂循环的可逆性。从原子力显微镜分析发现,该现象可能与膜微结构的改变密切相关。

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