Ultrasonic Linear Motor using Multilayer Piezoelectric Actuators and Experiment of Precision Positioning Control

摘要

We designed a new type ultrasonic linear motor with multilayer piezoelectric actuators. To find a solution to overcome the small tensile strength of the multilayer piezoelectric actuators, a special construction using wedges has been developed. This kind of motor can move agilely forward and backward. We measured the ultrasonic linear motor's moving characteristic. Finally, Applying adjusting frequency and phase, and PI controlling strategy, the μm order precision in position was attained.