A New Lapping Film with Agglomerative Super Fine Abrasives for Large-Diameter Workpiece Surface Finishing

摘要

A lapping film with agglomerative superfine abrasives was previously reported on its excellent finishing properties: achieving scratch-free optical mirror surface quality at a much higher finishing rate compared with the traditional slurry/pad finishing. However, finishing properties over a long process time and the possibility in applying it to large-diameter workpiece surface finishing, were left unexamined. In this study, the finishing properties over a long finishing time are investigated. Different from the conventional fixed-abrasive tools, self-dressing of the agglomerative abrasives occurrs during the process, allowing excellent surface roughness obtained continuously at a relative stable removal rate. And, it is found that film indexed Web-type finishing is effective to avoid the influence of the abrasive wear and maintain the initial high removal rate with the finishing time. Furthermore, the possibility to achieve excellent surface quality with high removal rate in large-diameter workpiece is also verified from the results of Φ 200mm P-TEOS film finishing.