Abstract: In this work, a new fully automated geometrical modeling and meshing tool is described. It imports standard layout formats, images, and 3D boundary representations s. A 3D model is then generated by simulating 3D operations specified by the process data or the user. A 3D finite element mesh with tagged boundary and volume conditions is then automatically created. The automatic generation of 3D model and mesh takes typically a couple of minutes on a current PC machine. The paper will present the geometry/meshing engines, user interfaces, and will demonstrate them on a range of microsystem applications. !0
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