Operating modes in scanning probe microscopy

机译：扫描探针显微镜中的操作模式

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A short overview of the different operating modes in Atomic Force Microscopy is presented. After a brief introduction to the theoretical background involved some examplary results are shown and discussed.

机译：简要介绍了原子力显微镜中的不同操作模式。在简要介绍所涉及的理论背景之后，将显示并讨论一些示例性结果。

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来源
《Defect recognition and image processing in semiconductors and devices》|1993年|61-64|共4页
会议地点 Santander(ES);Santander(ES)
作者
Frank Reineke; Stefan Kaemmer; Stefan Gehring;
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作者单位

Topometrix GmbH, Pallaswiesenstr. 180, 6100 Darmstadt, Germany;

Topometrix GmbH, Pallaswiesenstr. 180, 6100 Darmstadt, Germany;

Topometrix GmbH, Pallaswiesenstr. 180, 6100 Darmstadt, Germany;

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会议组织
原文格式 PDF
正文语种 eng
中图分类硅酸盐工业;无机质材料;
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4. Operating modes in scanning probe microscopy [C] . International conference on Defect recognition and image processing in semiconductors and devices . 1994

机译：扫描探针显微镜中的操作模式
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Operating modes in scanning probe microscopy

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