Mix and match overlay method by compensating dynamic scan distortion error

机译：通过补偿动态扫描失真误差的混合匹配叠加方法

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摘要

This paper discusses the compensation method and APC system to reduce errors in mix and matching overlay between scanners. We proposed the compensation model for intra-field errors in mix and matching. And we developed the advanced APC system also to improve dynamic scan distortion using the compensation model.

机译：本文讨论了补偿方法和APC系统，以减少扫描仪之间混合和匹配重叠时的误差。我们提出了混合和匹配中场内误差的补偿模型。我们还开发了先进的APC系统，以使用补偿模型来改善动态扫描失真。

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来源
《Data Analysis and Modeling for Process Control》|2004年|P.221-227|共7页
会议地点 Santa Clara CA(US)
作者
Takuya Kono; Manabu Takakuwa; Keita Asanuma; Nobuhiro Komine; Tatsuhiko Higashiki;
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作者单位

Process and Manufacturing Engineering Center, Semiconductor Company, Toshiba Corporation, Yokohama, Kanagawa 235-8522, Japan;

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会议组织
原文格式 PDF
正文语种 eng
中图分类微电子学、集成电路（IC）;
关键词
mix and match; dynamic scan distortion; APC system;

机译：混合匹配动态扫描失真APC系统;

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2. Life Beyond Mix-and-Match: Controlling Sub-0.18 μm Overlay Errors [J] . Terrence E. Zavecz, Rene Blanquies, Amit Zeidler Semiconductor International . 2000,第8期

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4. Mix and match overlay method by compensating dynamic scan distortion error [C] . Takuya Kono, Manabu Takakuwa, Keita Asanuma, Society of Photo-Optical Instrumentation Engineers Conference on Data Analysis and Modeling for Process Control . 2004

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Mix and match overlay method by compensating dynamic scan distortion error

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