Common-path interference profiler with nondestructive testing of a supersmooth surface

摘要

Abstract: The paper described a double-focus interference profiler, its characteristics as below: There isn't standard reference mirror in the instrument. Non-destructive testing is operated for surface. It will be valid for rejecting various noises using interference and electronic common-mode processing system. All measurements are carried out by computer then surface roughness parameters are displayed. The results are compared with commercial WYKO and identity is very well. The instrument is suitable for testing nanometer and sub-nanometer surface, especially soft materials and films. The instrument has a sensitivity to height of 0.1 nm and the lateral sensitivity 1 $mu@m.!6