LiNbO3 rhomboprism machining

摘要

Abstract: This paper studies the LiNbO$-3$/ crystal rohomboprism machining problem, introduces how to select material including initial separation and finish separation and determine optical axis, proposes a method to determine material uniformity according to graph of interference fringes and discussed the technology problems of rough lapping, finish lapping and polishing and some problems should be attended to e.g. temperature, spindle rotating speed, abrasives, hanging method and iris controlling and so on. Some methods for measuring rhomboprism and formula for calculating deviation angle are given. The workpiece machined by the machining technology proposed in this paper surface flatness is 0.1 $mu@m, roughness is Ra 0.008 $mu@m (P $EQ III), angle error is 1', parallelism error is 15', which can meet the drawing requirements.!3