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Zone plate interferometer for testing aspherical surfaces

机译:用于测试非球面表面的波带干涉仪

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Abstract: The recent development and application of the technique of using zone plate interferometry to test aspherical surfaces are summarized. The advantages and disadvantages of several types of zone-plate interferometer are given. The principle and method for testing aspherical surfaces using a modified zone-plane (MZP) are described. The relation between installation of MZP and measurement precision is analyzed. The design of MZP is modified to eliminate the curvature at the border of the interference pattern. At last, some experimental results are given.!4
机译:摘要:总结了利用波带片干涉仪测试非球面技术的最新进展和应用。给出了几种类型的波带片干涉仪的优缺点。描述了使用改进的区域平面(MZP)测试非球面的原理和方法。分析了MZP的安装与测量精度之间的关系。修改了MZP的设计,以消除干涉图样边界处的曲率。最后给出了一些实验结果。!4

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