Prototyping the Apparatus of the Atmospheric Pressure Plasma Processing for the Damage Free Surface

摘要

An experimental prototype apparatus of the atmospheric pressure plasma processing for the damage free surfaces is designed. Material removal of this novel machining system is a pure chemical process. A newly designed capacity coupled plasma jet is utilized to generate the reactive atoms and the product of chemical reaction can be vaporized from the surface of the work piece easily. The whole system architecture is introduced and the experimental result shows that sub-nanometer roughness can be achieved.