Microanoscale tribology and mechanics of MEMS/NEMS materials and devices

摘要

The field of MEMS/NEMS has expanded considerably over the last decade. The length scale and large surface-to-volume ratio of the devices result in very high retarding forces such as adhesion and friction that seriously undermine the performance and reliability of the devices. These tribological phenomena need to be studied and understood at the micro- to nanoscales. In addition, materials for MEMS/NEMS must exhibit good microscale tribological properties. There is a need to develop lubricants and identify lubrication methods that are suitable for MEMS/NEMS. Using atomic force microscopy-based techniques, researchers have conducted microanotribological studies of materials and lubricants for use in MEMS/NEMS devices. In addition, component level testing have also been carried out to aid in better understanding of the observed tribological phenomena in MEMS/NEMS.