Fabrication of Micro Optical Components by High Precision Embossing

摘要

Optical components, such as miniature spectrometer gratings working in the infrared range for environmental monitoring or physical analytics. contribute appreciably to the price of icro Electro Opto Mechanical Systems (MOEMS). There optical compoentns could be a part of a miniature functional package produced with an alternative fabrication technoilogy based on cold forming of metals.