Modelling of nonlocal physical effects in semiconductor plasma using quasi-hydrodynamic models

摘要

Computational microelectronics is an area of science where applicatios of mathematics may be considered only as a two-way interaction between mathematical and physical-technological models. Problems of plasmo-chemical etching, crystal growth, ion lithography, and of the description of processes of fluid and gas epitaxy, and of electron-hole plasma in semiconductor devices devices give just a few examples of today's challenging problems in this rapidly growing field where mathematical tools essentially determine the technological progress.