Abstract: TiO$-2$/ thin films doped with various transitionmetals were systematically fabricated by combinatoriallaser MBE technique. Alternating KrF excimer laser($lambda $EQ 248 nm) ablation of TiO$-2$/ andTi$-1$MIN@x$/ M$-x$/O$-2$/ (M $EQ transition metal) wasemployed to deposit combinatorial library of 18 samplesfor each dopant with different concentrations. Anatasefilms with c-axis orientation were grown epitaxially onSrTiO$-3$/(001) substrate while the rutile phase filmswith a-axis orientation were on Al$- 2$/O$-3$/(0001)substrate. Solid solubility of transition metals inboth the phases was determined by X-ray diffraction.The anatase phase was found to dissolve the transitionmetals in higher concentrations than rutile phase. Theparallel evaluation of the photocatalytic activity ofthe doped TiO$-2$/ in combinatorial libraries wasperformed with respect to photo-decomposition of waterin presence of a small amount of oxidizing or reducingagent which induced pH changes on the pixels. The highthroughput evaluation of combinatorially depositedphotocatalytic thin films was realized by adopting apotentiometric pH field effect transistor for sensingsuch pH changes.!25
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机译：摘要：用组合激光MBE技术系统地制备了掺杂有多种过渡金属的TiO $ -2 $ /薄膜。使用了交替的KrF准分子激光（λλEQ248 nm）烧蚀TiO $ -2 $ /和Ti $ -1 $ MIN @ x $ / M $ -x $ / O $ -2 $ /（M $ EQ过渡金属）为每种浓度不同的掺杂剂沉积18个样品的组合库。在SrTiO $ -3 $ /（001）衬底上外延生长具有c轴取向的锐钛矿膜，而在a $ -2 $ / O $ -3 $ /（0001）衬底上外延生长具有a轴取向的金红石相膜。通过X射线衍射确定过渡金属在两相中的固溶性。发现锐钛矿相比金红石相能溶解更高浓度的过渡金属。对于在少量氧化剂或还原剂的存在下引起像素上pH值变化的水的光分解，对组合库中掺杂的TiO $ -2 $ /的光催化活性进行了平行评估。通过采用电位型pH场效应晶体管感应这种pH变化，可以实现组合沉积的光催化薄膜的高通量评估。25
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