Study on large size and low leakage SiC diode detector for nuclear radiation detection

摘要

. In this paper, the simulation, the fabrication, and the electrical characteristics of 4H-SiC PiN detector were reported. An dry etch mesa structure was used as detector termination structure to avoid field crowding at the edage of device and improve the device performance. A leakage current of 18nA was measured at a cathode bias of 600 V from the 4H-SiC PiN detector. And the device shows a forward voltage drop of 2.7V with a forward current of 10mA. Anuclear radiation detection result used this SiCPiN detector was also reported.