压缩喷雾热分解方法制备MgO 薄膜的研究

摘要

Using Mg(CH3COO)2 as precursor, the effects of some experimental parameters on the quality of the Mgo film by a simple compress spray prolysis were discussed in detail. In addition，the Microstructrue of the MgO thin films were examined with X-raydiffraction(XRD) and scan electron microscopy(SEM)， The better condition had been concluded.The results indicated that substrate temperature and deposition rate were key factors for growing MgO fims， and oriented MgO films were obtained when the substate temperature and the flow rate of O2 was 600℃ and 2L/min respectively，The surface morphology of the as-prepared MgO films was cuber polycrystalline.