Overview of the optic component manufacturing and measurements for the Advanced Virgo optics

摘要

Advanced Virgo is an upgrade to the Virgo detector located near Pisa, Italy designed with an ultimate goal of the detection of gravitational waves originating from cosmic sources. The upgrade will provide an order of magnitude increase in the sensitivity of the detector and allow the exploration of a volume 1,000 times larger than Virgo. The system design includes 21 'half meter' class optics for which Zygo has been selected as the primary supplier. The optic components have nanometer level low-order figure requirements along with sub-angstrom roughness requirements specified over a wide spatial frequency band. In this paper the results and methodologies used in achieving such extreme requirements that are typically associated with the semiconductor lithography industry will be presented.