High-Precision Angle Measuring Technology and High-Precision Angle Sensor

摘要

High-resolution and high-precision angle sensors are expected for nanotechnology control system. The technology for manufacturing high-precision disks, and the measurement evaluation technology through the angle calibration system, and the development of a high-resolution optical angle sensor with high-precision and a self-accuracy calibrating function was achieved. This was accomplished using fundamental technology such as the high-precision disk that forms the core part of the angle sensor, and a high-precision measuring instrument and the self-calibrating technology of an angle sensor. A high-precision angle calibration system and a high-precision angle sensor with a resolution of 0.001 seconds were achieved.