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Precision Tiltmeter as a Reference for Slope Measuring Instruments

【摘要】 The next generation of synchrotrons and free electron lasers require extremely high-performance x-ray optical systems for proper focusing. The necessary optics cannot be fabricated without the use of precise optical metrology instrumentation. In particular, the Long Trace Profiler (LTP) based on the pencil-beam interferometer is a valuable tool for low-spatial-frequency slope measurement with x-ray optics. The limitations of such a device are set by the amount of systematic errors and noise. A significant improvement of LTP performance was the addition of an optical reference channel, which allowed to partially account for systematic errors associated with wiggling and wobbling of the LTP carriage. However, the optical reference is affected by changing optical path length, non-homogenous optics, and air turbulence. In the present work, we experimentally investigate the questions related to the use of a precision tiltmeter as a reference channel. Dependence of the tiltmeter performance on horizontal acceleration, temperature drift, motion regime, and kinematical scheme of the translation stage has been investigated. It is shown that at an appropriate experimental arrangement, the tiltmeter provides a slope reference for the LTP system with accuracy on the level of 0.1 μrad (rms).

【会议名称】 Advances in Metrology for X-Ray and EUV Optics II; Proceedings of SPIE-The International Society for Optical Engineering; vol.6704

【会议地点】San DiegoCA(US)

【作者】 Jonathan L. Kirschman; Edward E. Domning; Gregory Y. Morrison; Brian V. Smith; Valeriv V. Yashchuk;

【作者单位】 Lawrence Berkeley National Laboratory, Berkeley, California, 94720;

【会议组织】

【会议召开年】 2007

【页码】P.8.1-8.12

【总页数】12

【原文格式】PDF

【正文语种】eng

【中图分类】TH741;

【原文服务方】国家工程技术数字图书馆

【关键词】tiltmeter;slope measuring instrument;long trace profiler;LTP;error reduction;reference;x-ray optics;optical metrology;

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