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Second metrology round-robin of APS, ESRF and SPring-8 laboratories of elliptical and spherical hard-x-ray mirrors

【摘要】 The first series of metrology round-robin measurements carried out in 2005 at the APS, ESRF and SPring-8 metrology laboratories involving two flat x-ray mirrors and a cylindrical x-ray mirror has shown excellent agreement among the three facilities' Long Trace Profilers (LTP) despite their architectural differences. Because of the growing interest in diffraction-limited hard x-ray K.-B focusing mirrors, it was decided to extend the round robin measurements to spherical and aspheric x-ray mirrors. The strong surface slope variation of these mirrors presents a real challenge to LTP. As a result, new LTP measurement protocol has to be developed and implemented to ensure measurement accuracy and consistency. In this paper, different measurement techniques and procedures will be described, the results will be discussed, and comparison will be extended to micro-stitching interferometry measurements performed at Osaka University, Japan.

【会议名称】 Advances in Metrology for X-Ray and EUV Optics II; Proceedings of SPIE-The International Society for Optical Engineering; vol.6704

【会议地点】San DiegoCA(US)

【作者】 A. Rommeveaux; L. Assoufid; H. Ohashi; H. Mimura; K. Yamauchi; J. Qian; T. Ishikawa; C. Morawe; A. T. Macrer; A. Khounsary; S. Goto;

【作者单位】 ESRF, 6 rue J. Horowitz, BP 220, 38043 Grenoble, France; APS, Argonne National Laboratory, 9700South Cass Avenue, Argonne 60439, Illinois, USA; JASRI SPring-8, 1-1-1 Kouto Sayo, Hyogo 679-5198, Japan; Department of Precision Science Technology, Graduate;

【会议组织】

【会议召开年】 2007

【页码】P.10.1-10.12

【总页数】12

【原文格式】PDF

【正文语种】eng

【中图分类】TH741;

【关键词】long trace profiler;round robin;x-ray mirrors;interferometer;stitching;

【原文服务方】国家工程技术数字图书馆

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