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Flat-field calibration of CCD detector for Long Trace Profiler

【摘要】 The next generation of synchrotrons and free electron lasers requires x-ray optical systems with extremely high-performance, generally, of diffraction limited quality. Fabrication and use of such optics requires highly accurate metrology. In the present paper, we discuss a way to improve the performance of the Long Trace Profiler (LTP), a slope measuring instrument widely used at synchrotron facilities to characterize x-ray optics at high-spatial-wavelengths from approximately 2 mm to 1 m. One of the major sources of LTP systematic error is the detector. For optimal functionality, the detector has to possess the smallest possible pixel size/spacing, a fast method of shuttering, and minimal non-uniformity of pixel-to-pixel photoresponse. While the first two requirements are determined by choice of detector, the non-uniformity of photoresponse of typical detectors such as CCD cameras is around 2-3%. We describe a flat-field calibration setup specially developed for calibration of CCD camera photo-response and dark current with an accuracy of better than 0.5%. Such accuracy is adequate for use of a camera as a detector for an LTP with performance of ~0.1 microradian (rms). We also present the design details of the calibration system and results of calibration of a DALSA CCD camera used for upgrading our LTP-U instrument at the ALS Optical Metrology Laboratory.

【会议名称】 Advances in Metrology for X-Ray and EUV Optics II; Proceedings of SPIE-The International Society for Optical Engineering; vol.6704

【会议地点】San DiegoCA(US)

【作者】 Jonathan L. Kirschman; Edward E. Domning; Keith D. Franck; Steven C. Irick; Tony Warwick; Valeriy V. Yashchuk; Alastair A. MacDowell; Wayne R. McKinney; Gregory Y. Morrison; Brian V. Smith;

【作者单位】 Lawrence Berkeley National Laboratory, Berkeley, California, USA 94720;

【会议组织】

【会议召开年】 2007

【页码】P.17.1

【总页数】1

【原文格式】PDF

【正文语种】eng

【中图分类】TH741;

【原文服务方】国家工程技术数字图书馆

【关键词】long trace profiler;LTP;LTP detector;camera calibration;flat field source;error reduction;optical metrology;

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